Photolithography

LEAD AUTHOR Christy Chao
Doctoral Candidate
Department of Biological Engineering
MIT
Cambridge, MA
christyc@mit.edu
PROTOCOL TYPE:
Protocol Document
SYNOPSIS: Engelward Lab protocol for creating microfeature molds from silicon wafers by lithographically patterning SU-8 photoresist.
PROTOCOL TYPE:
Protocol Document

SYNOPSIS: Engelward Lab protocol for creating microfeature molds from silicon wafers by lithographically patterning SU-8 photoresist.
Tags: photolithography